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Cleanroom Design

Contributor(s): Material type: TextTextPublication details: New York John Wiley & Sons, Inc. 2003Edition: 2nd edDescription: 305pISBN:
  • 9780471942047
DDC classification:
  • 696 CLE
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An Introduction to The Design of Clean and Containment Areas The Design of Cleanrooms for the Microelectronics Industry The Design of Cleanrooms for the Pharmaceutical Industry Contamination Control Facilities for The Biotechnology Industry International Standards for the Design of Cleanrooms Cost Efficiency and Energy Saving Concepts for Cleanrooms High Efficiency Air Filtration Surface Finishes in Cleanrooms Purification Techniques for Clean Water The Design of An Ultra Pure Water System for Use in the Manufacture of Integrated Circuits The Production and Transmission of High Purity Gases for the Semiconductor Industry Materials for Services Pipework

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