Handbook of Vacuum Science and Technology

Part - 1: Fundaments of Vacuum Technology and Surface Physics Vacuum Nomenclature and Definitions Gas Properties Molecular Processes and Kinetic Theory Throughput, Pumping Speed, Evacuation Rate, Outgassing Rate, and Leak Rate Gas Flow Conductance Flow Calculations Surface Physics and its Relation to Vacuum Science Part - 2: Creation of Vacuum Technology of Vacuum Pumps - An Overview Diaphragm Pumps Vacuum Blowers Vacuum Jet Pumps (Diffusion Pumps) Cryogenic Pumps Turbomolecular Pumps Part - 3: Vacuum Measurements The Measurement of Low Pressures Mass Analysis and Partial Pressure Measurement Practical Aspects of Vacuum System Mass Spectrometers Mass Flow Measurement and Control Part - 4: Systems Design and Components Selection Considerations for Vacuum Valves Flange and Components Systems Magnetic-Fluid - Sealed Rotary Motion Feedthroughs Viewports Construction Materials Demountable Seals fro Flanges and Valves Outgassing of Materials Aluminum Based Vacuum Systems Preparation and Cleaning of Vacuum Surfaces Part - 5: Vacuum Applications High Vacuum Based Processes: Sputtering Plasma Etching Ion Beam Technology Pulsed Laser Deposition Plasma-Enhanced Chemical Vapor Deposition Common analytical Methods for surface and Thin Film Part - 6: Large Scale Vacuum-Based Processes Roll to Roll Vacuum Coating The Development of Ultra High Vacuum Technology for Particle Accelerators and Magnetic Fusion Devices