Semiconductor Materials and Process Technology Handbook: For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)

McGuire, Gary E.

Semiconductor Materials and Process Technology Handbook: For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI) - New Delhi Jaico Publishing House 2008 - 675p

Silicon Materials Technology The Thermal Oxidation of Silicon and Other Semi Conductor Materials Chemical Vapor Deposition of Silicon and Its Compounds Chemical Etching and Slice Cleanup of Silicon Plasma Processing: Mechanisms and Applications Physical Vapor Deposition Diffusion and Ion Implantation in Silicon Microlithography for VLSI Metallization for VLSI Interconnect and Packaging Characterization of Semiconductor Materials

9788179929063 0.00


Electronic Engineering

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