High - Vacuum Technology: A Practical Guide

Hablanian, Marsbed H.

High - Vacuum Technology: A Practical Guide - 2nd ed - New York Marcel Dekker, Inc. 1997 - 551p

Properties of Gases Fluid Flow and Pumping Concepts Vacuum Systems Coarse Vacuum Pumps Vapor Jet (Diffusion) Pumps Turbomolecular Pumps Cryogenic Pumps Gettering and Ion Pumping Overloading of Vacuum Pumps Ultrahigh Vacuum Vacuum Gages and gas Analyzers Leak Detection

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