Run to Run Control in Semiconductor Manufacturing (Record no. 148719)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00700nam a22001697a 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 240425b |||||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780849311789 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | RUN |
| 245 ## - TITLE STATEMENT | |
| Title | Run to Run Control in Semiconductor Manufacturing |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Name of publisher, distributor, etc | CRC Press |
| Place of publication, distribution, etc | USA |
| Date of publication, distribution, etc | 2001 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 348p |
| 500 ## - GENERAL NOTE | |
| General note | Foundation for Control<br/>R2R Control Algorithms<br/>Integrating Control<br/>Customization Methodology<br/>Case Studies<br/>Advanced Topics<br/>Summary and Conclusions |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Moyne, James |
| Relator term | Editor |
| 9 (RLIN) | 106482 |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Castillo, Enrique Del |
| Relator term | Editor |
| 9 (RLIN) | 106483 |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Hurwitz, Arnon Max |
| Relator term | Editor |
| 9 (RLIN) | 106484 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Dewey Decimal Classification |
| Item type | Book |
No items available.