Handbook of VLSI Microlithography: Principles, Tools, Technology and Applications (Record no. 34322)
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| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 140223b2005 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9788179924754 |
| Terms of availability | 0.00 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.395 |
| Item number | HAN |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Helbert, John N. |
| 245 ## - TITLE STATEMENT | |
| Title | Handbook of VLSI Microlithography: Principles, Tools, Technology and Applications |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | New Delhi |
| Name of publisher, distributor, etc. | Jaico Publishing House |
| Date of publication, distribution, etc. | 2005 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1001p |
| 600 ## - SUBJECT ADDED ENTRY--PERSONAL NAME | |
| Personal name | Electrical Engineering |
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