The Science and Engineering of Microelectronic Fabrication (Record no. 48590)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 01174nam a2200169Ia 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 140223b1996 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780195105087 |
| Terms of availability | 0.00 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | CAM |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Campbell, Stephen A. |
| 245 ## - TITLE STATEMENT | |
| Title | The Science and Engineering of Microelectronic Fabrication |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc. | New York |
| Name of publisher, distributor, etc. | Oxford University Press |
| Date of publication, distribution, etc. | 1996 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 536p |
| 500 ## - GENERAL NOTE | |
| General note | An Introduction to Microelectronic Fabrication Semiconductor Substrates Diffusion Thermal Oxidation Ion Implantation Rapid Thermal Processing Optical Lithography Photoresists Nonoptical Lithographic Techniques Vacuum Science and Plasmas Etching Physical Deposition: Evaporation and Sputtering Chemical Vapor Deposition Epitiaxial Growth Device Isolation, Contacts and Metallization CMOS Technologies gas FET Technologies Silicon Bipolar Technologies Integrated Circuit Manufacturing |
| 890 ## - | |
| -- | USA |
| 995 ## - RECOMMENDATION 995 [LOCAL, UNIMARC FRANCE] | |
| -- | CAM |
| -- | 0.00 |
| -- | 0 |
| -- | 049 |
| -- | 00115 |
| -- | 0 |
| -- | 0.00 |
| -- | C |
| -- | 19971211 |
| -- | Universal Book House |
| -- | Reference |
| 995 ## - RECOMMENDATION 995 [LOCAL, UNIMARC FRANCE] | |
| -- | CAM |
| -- | 0.00 |
| -- | 0 |
| -- | 049 |
| -- | 0 |
| -- | 0.00 |
| -- | C |
| -- | 20020920 |
| -- | General |
No items available.