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Nano and Micro Electro Mechanical Systems: Fundamentals of Nano and Microengineering by Sergey Edward Lyshevski

By: Lyshevski, Sergey Edward.
Material type: materialTypeLabelBookPublisher: London CRC Press 2005Edition: 2nd ed.Description: 722p.ISBN: 9780849328381.Subject(s): Electronic EngineeringDDC classification: 621.381
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Nano and Microscience, Engineering and Technology Nano and Microscale Systems, Devices and Structures Nano and Microsystems: Classification and Consideration Fundamentals of Microfabrication and MEMS Fabrication Technologies Devising and Synthesis of NEMS and MEMS Modeling of Micro and Nanoscale Eletromechanical Systems and Devices Quantum Mechanics and Its Applications Molecular and Carbon Nanoelectronics Control of MEMS and NEMS Examples in Synthesis, Analysis, Design and Fabrication of MEMS

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