TY  - BOOK
AU  - Moyne, James
AU  - Castillo, Enrique Del
AU  - Hurwitz, Arnon Max
TI  - Run to Run Control in Semiconductor Manufacturing
SN  - 9780849311789
U1  - 621.38152 
PY  - 2001///
CY  - USA
PB  - CRC Press
N1  - Foundation for Control
R2R Control Algorithms
Integrating Control
Customization Methodology
Case Studies
Advanced Topics
Summary and Conclusions
ER  -