TY - BOOK AU - Whyte, W. TI - Cleanroom Design SN - 9780471942047 U1 - 696 PY - 2003/// CY - New York PB - John Wiley & Sons, Inc. N1 - An Introduction to The Design of Clean and Containment Areas The Design of Cleanrooms for the Microelectronics Industry The Design of Cleanrooms for the Pharmaceutical Industry Contamination Control Facilities for The Biotechnology Industry International Standards for the Design of Cleanrooms Cost Efficiency and Energy Saving Concepts for Cleanrooms High Efficiency Air Filtration Surface Finishes in Cleanrooms Purification Techniques for Clean Water The Design of An Ultra Pure Water System for Use in the Manufacture of Integrated Circuits The Production and Transmission of High Purity Gases for the Semiconductor Industry Materials for Services Pipework ER -