TY  - BOOK
AU  - May, Gary S.
AU  - Sze, Simon M.
TI  - Fundamentals of Semiconductor Fabrication
SN  - 9789812530721
U1  - 621.38152 
PY  - 2004///
CY  - New York
PB  - John Wiley & Sons, Inc.
KW  - Electronic Engineering
ER  -