TY  - BOOK
AU  - Helbert, John N.
TI  - Handbook of VLSI Microlithography: Principles, Tools, Technology and Applications
SN  - 9788179924754
U1  - 621.395 
PY  - 2005///
CY  - New Delhi
PB  - Jaico Publishing House
KW  - Electrical Engineering
ER  -