TY  - BOOK
AU  - Kim, Young-Hee
AU  - Lee, Jack C.
TI  - Hf-Based High-k Dielectrics: Process Development, Performance Characterization and Reliability
SN  - 9781598293548
U1  - 537.24 
PY  - 2005///
CY  - USA
PB  - Morgan & Claypool Publshers
KW  - Electronic Engineering
ER  -