TY  - BOOK
AU  - Lobontiu, Nocolae
AU  - Garcia, Ephrahim
TI  - Mechanics of Microelectro-Mechanical Systems
SN  - 9788181288493
U1  - 621 
PY  - 2005///
CY  - Boston
PB  - Kluwer Academic Publishers
KW  - Electronic Engineering
ER  -