TY  - BOOK
AU  - Lyshevski, Sergey Edward
TI  - Mems and Mems Systems, Devices and Structures
SN  - 9780849312625
U1  - 621.381 
PY  - 2002///
CY  - Boca Raton
PB  - CRC Press
KW  - Electronic Engineering
ER  -