TY - BOOK AU - Gardner, Julian W. AU - Awadelkarim, Osama O. AU - Varadan, Vijay K. TI - Microsensors, MEMS and Smart Devices SN - 9788126540822 U1 - 621.381 PY - 2013/// CY - Delhi PB - Wiley India (P) Ltd. KW - Electrical Engineering ER -