TY  - BOOK
AU  - Chang, C. Y.
AU  - Sze, S. M.
TI  - ULSI Technology
SN  - 9780071141055
U1  - 621.395 
PY  - 1996///
CY  - New Delhi
PB  - Tata McGraw-Hill Publishing Company Ltd.
KW  - Electronic Engineering
ER  -