TY  - BOOK
AU  - Welch, Kimo
TI  - Capture Pumping Technology
SN  - 9780444508829
U1  - 621.6 
PY  - 2001///
CY  - Amsterdam
PB  - Elsevier Science
KW  - Mechanical Engineering
N1  - Basic Theory Sputter Ion Pumping Titanium Sublimation Pumping Cryopumping Subject Index Author Index
ER  -