TY  - BOOK
AU  - Hablanian, Marsbed H.
TI  - High - Vacuum Technology: A Practical Guide
SN  - 9780824798345
U1  - 621.55 
PY  - 1997///
CY  - New York
PB  - Marcel Dekker, Inc.
N1  - Properties of Gases Fluid Flow and Pumping Concepts Vacuum Systems Coarse Vacuum Pumps Vapor Jet (Diffusion) Pumps Turbomolecular Pumps Cryogenic Pumps Gettering and Ion Pumping Overloading of Vacuum Pumps Ultrahigh Vacuum Vacuum Gages and gas Analyzers Leak Detection
ER  -