TY  - BOOK
AU  - Jackson, Mark J.
TI  - Micro and Nanomanufacturing
SN  - 9780387258744
U1  - 620.5 
PY  - 2007///
CY  - New York
PB  - Springer Science+Business Media, Inc
KW  - Mechanical Engineering
N1  - Principles of Micro and Nanofabrication Microfabriaction Using X-Ray Lithography Manufacturing High Aspect Ration Microstructures Meso Micromachining Mechanical Micromachining Microgrinding Diamond Micro Cutting Tools Laser Micro and Nanofabrication Micromachining Using Water Droplets Diamond Nanogrinding Nanomachining Micro and Nanomanufacturing
ER  -