TY  - BOOK
AU  - Lyshevski, Sergey Edward
TI  - Nano and Micro Electro Mechanical Systems: Fundamentals of Nano and Microengineering
SN  - 9780849328381
U1  - 621.381 
PY  - 2005///
CY  - London
PB  - CRC Press
KW  - Electronic Engineering
N1  - Nano and Microscience, Engineering and Technology Nano and Microscale Systems, Devices and Structures Nano and Microsystems: Classification and Consideration Fundamentals of Microfabrication and MEMS Fabrication Technologies Devising and Synthesis of NEMS and MEMS Modeling of Micro and Nanoscale Eletromechanical Systems and Devices Quantum Mechanics and Its Applications Molecular and Carbon Nanoelectronics Control of MEMS and NEMS Examples in Synthesis, Analysis, Design and Fabrication of MEMS
ER  -