The Science and Engineering of Microelectronic Fabrication - Campbell, Stephen A. (New York Oxford University Press, 1996)
An Introduction to Microelectronic Fabrication Semiconductor Substrates Diffusion Thermal Oxidation Ion Implantation Rapid Thermal Processing Optical Lithography Photoresists Nonoptical Lithographic Techniques Vacuum Science and Plasmas Etching Physical Deposition: Evaporation and Sputtering Chemical Vapor Deposition Epitiaxial Growth Device Isolation, Contacts and Metallization CMOS Technologies gas FET Technologies Silicon Bipolar Technologies Integrated Circuit Manufacturing