TY  - BOOK
AU  - O'Hanlon, John F.
TI  - A User's Guide to Vacuum Technology
SN  - 9780471270522
U1  - 621.55 
PY  - 2003///
CY  - New York
PB  - John Wiley & Sons, Inc.
KW  - Mechanical Engineering
N1  - Part - 1: It's Basis Vacuum Technology Gas Properties Gas Flow Gas Release from Solids Part - 2: Measurement Pressure Gauges Flow Meters Pumping Speed Residual Gas Analyzers Interpretation of RGA Data Part - 3: Production Mechanical Pumps Turbomolecular Pumps Diffusion Pumps Pumps Fluids Getter and Ion Pumps Cryogenic Pumps Part - 4: Materials Materials in Vacuum Joints, Seals and Valves Lubrication Part - 5: Systems Rough Vacuum Pumping High Vacuum Systems Ultraclean Vacuum Systems High Flow Systems Multichamber System Leak Detection
ER  -