TY  - BOOK
AU  - Adams, Thomas M.
AU  - Layton, Richard A. 
TI  - Introductory MEMS: Fabrication and Applications
SN  - 9788132206637
U1  - 621.381 
PY  - 2014///
CY  - New Delhi
PB  - Springer (India) Pvt. Ltd.
KW  - Mechanical Engineering
ER  -