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Integrated Chemical Microsensor Systems in CMOS Technology

By: Material type: TextTextSeries: Microtechnology and MemsPublication details: Berlin Springer-Verlag 2005Description: 229pISBN:
  • 9783540237822
Subject(s): DDC classification:
  • 621.39732 HIE
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Introduction Fundamentals of Chemical Sensing Micro technology for Chemical Sensors Micro fabricated Chemical Sensors CMOS Platform Technology for Chemical Sensors Outlook and Future Developments

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