000			01120nam a2200169Ia 4500
008			140223b2003 xxu||||| |||| 00| 0 eng d
020			_a9780471942047 _c0.00
082			_a696 _bCLE
245			_aCleanroom Design
250			_a2nd ed
260			_aNew York _bJohn Wiley & Sons, Inc. _c2003
300			_a305p
500			_aAn Introduction to The Design of Clean and Containment Areas The Design of Cleanrooms for the Microelectronics Industry The Design of Cleanrooms for the Pharmaceutical Industry Contamination Control Facilities for The Biotechnology Industry International Standards for the Design of Cleanrooms Cost Efficiency and Energy Saving Concepts for Cleanrooms High Efficiency Air Filtration Surface Finishes in Cleanrooms Purification Techniques for Clean Water The Design of An Ultra Pure Water System for Use in the Manufacture of Integrated Circuits The Production and Transmission of High Purity Gases for the Semiconductor Industry Materials for Services Pipework
700			_aWhyte, W. _eEditor _995918
942			_2ddc _cLB
995			_aPharmacy Reference _eP0002319 _j696 _yP0002319
999			_c15226 _d15226