| 000 | 00801nam a2200181Ia 4500 | ||
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_a9780070487093 _c0.00 |
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| 082 |
_a621.381 _bHSU |
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| 100 | _aHsu, Tai-Ran | ||
| 245 | _aMEMS and Microsystems: Design and Manufacture | ||
| 250 | _b2nd Reprint 2003 | ||
| 260 |
_aNew Delhi _bTata McGraw-Hill Publishing Company Ltd. _c2002 |
||
| 300 | _a436p | ||
| 600 | _aMechanical Engineering | ||
| 890 | _aIndia | ||
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