000			01192nam a2200181Ia 4500
008			140223b2005 xxu||||| |||| 00| 0 eng d
020			_a9780849328381 _c0.00
082			_a621.381 _bLYS
100			_aLyshevski, Sergey Edward
245			_aNano and Micro Electro Mechanical Systems: Fundamentals of Nano and Microengineering
250			_a2nd ed
260			_aLondon _bCRC Press _c2005
300			_a722p
500			_aNano and Microscience, Engineering and Technology Nano and Microscale Systems, Devices and Structures Nano and Microsystems: Classification and Consideration Fundamentals of Microfabrication and MEMS Fabrication Technologies Devising and Synthesis of NEMS and MEMS Modeling of Micro and Nanoscale Eletromechanical Systems and Devices Quantum Mechanics and Its Applications Molecular and Carbon Nanoelectronics Control of MEMS and NEMS Examples in Synthesis, Analysis, Design and Fabrication of MEMS
600			_aElectronic Engineering
890			_aUK
995			_ALYS _B003426 _CECE-PG0 _D2652.74 _E0 _F049 _G088133 _H0 _I0.00 _J1724.45 35% _L20050617 _M06 _UC _W20050630 _XHimanshu Book Co. _ZReference
999			_c47702 _d47702