| 000 | 00485nam a2200157 4500 | ||
|---|---|---|---|
| 008 | 150403b xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9788132206637 | ||
| 082 |
_a621.381 _bADA |
||
| 100 | _aAdams, Thomas M. | ||
| 245 | _aIntroductory MEMS: Fabrication and Applications | ||
| 260 |
_c2014 _bSpringer (India) Pvt. Ltd. _aNew Delhi |
||
| 300 | _a444p | ||
| 650 | _aMechanical Engineering | ||
| 700 | _aLayton, Richard A. | ||
| 942 |
_2ddc _cLB |
||
| 999 |
_c93153 _d93153 |
||