The Science and Engineering of Microelectronic Fabrication

By:

Campbell, Stephen A

Material type: Text

TextPublication details: New York Oxford University Press 1996Description: 536pISBN:

9780195105087

DDC classification:

621.38152 CAM

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Holdings
Item type	Current library	Item location	Collection	Call number	Status	Date due	Barcode	Item holds
Book	NIMA Knowledge Centre	8th Floor Reading Zone	General	621.38152 CAM (Browse shelf(Opens below))	Available		T0007995
Reference Book	NIMA Knowledge Centre	6th Floor Silence Zone	Reference	621.38152 CAM (Browse shelf(Opens below))	Not For Loan		T0003565

Total holds: 0

An Introduction to Microelectronic Fabrication Semiconductor Substrates Diffusion Thermal Oxidation Ion Implantation Rapid Thermal Processing Optical Lithography Photoresists Nonoptical Lithographic Techniques Vacuum Science and Plasmas Etching Physical Deposition: Evaporation and Sputtering Chemical Vapor Deposition Epitiaxial Growth Device Isolation, Contacts and Metallization CMOS Technologies gas FET Technologies Silicon Bipolar Technologies Integrated Circuit Manufacturing

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