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Hf-Based High-k Dielectrics: Process Development, Performance Characterization and Reliability

Kim, Young-Hee

Hf-Based High-k Dielectrics: Process Development, Performance Characterization and Reliability - USA Morgan & Claypool Publshers 2005 - 92p

ISBN: 9781598293548 0.00

Subjects--Personal Names:
Electronic Engineering

Dewey Class. No.: 537.24 / KIM

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