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Semiconductor Materials and Process Technology Handbook: For Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI)

By: Material type: TextTextPublication details: New Delhi Jaico Publishing House 2008Description: 675pISBN:
  • 9788179929063
Subject(s): DDC classification:
  • 620.112972 SEM
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Holdings
Item type Current library Item location Collection Call number Status Date due Barcode Item holds
Book Book NIMA Knowledge Centre 9th Floor Reading Zone General 620.112972 SEM (Browse shelf(Opens below)) Available T0035047
Total holds: 0

Silicon Materials Technology The Thermal Oxidation of Silicon and Other Semi Conductor Materials Chemical Vapor Deposition of Silicon and Its Compounds Chemical Etching and Slice Cleanup of Silicon Plasma Processing: Mechanisms and Applications Physical Vapor Deposition Diffusion and Ion Implantation in Silicon Microlithography for VLSI Metallization for VLSI Interconnect and Packaging Characterization of Semiconductor Materials

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